Direct current magnetic insulation of an immersed RF antennaJAWORSKI, M. A; JURCZYK, B. E; ANTONSEN, Erik L et al.Plasma sources science & technology (Print). 2006, Vol 15, Num 3, pp 474-478, issn 0963-0252, 5 p.Article

Reduction of ion energies from a multicomponent Z-pinch plasmaRUZIC, David N; THOMPSON, Keith C; JURCZYK, Brian E et al.IEEE transactions on plasma science. 2007, Vol 35, Num 3, pp 606-613, issn 0093-3813, 8 p.Article

Study of the dynamic evolution and spectral properties of multi-component plasmas for EUV productionSPENCER, Joshua B; SRIVASTAVA, Shailendra N; ALMAN, Darren A et al.Proceedings of SPIE, the International Society for Optical Engineering. 2006, issn 0277-786X, isbn 0-8194-6194-6, 2Vol, VOL 2,615146.1-615146.9Conference Paper

Debris mitigation techniques for a Sn-and Xe-fueled EUV light sourceTHOMPSON, Keith C; SRIVASTAVA, Shailendra N; ANTONSEN, Erik L et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 65173L.1-65173L.11, issn 0277-786X, isbn 978-0-8194-6636-5Conference Paper

Experimental test chamber design for optics exposure testing and debris characterization of a xenon discharge produced plasma source for extreme ultraviolet lithographyTHOMPSON, Keith C; ANTONSEN, Erik L; HENDRICKS, Matthew R et al.Microelectronic engineering. 2006, Vol 83, Num 3, pp 476-484, issn 0167-9317, 9 p.Article